Mathematical simulation of the interaction of elliptically polarized light with a periodic nanostructure containing a defect layer

Yatsyshen Valeriy Vasil’evich

The paper presents the results of modeling the process of reflection of elliptically polarized light from a nanostructure with a defect. It is shown that the angular spectra of the modulus of the complex ellipsometric parameter of the reflected wave have clearly defined maxima, which are achieved at θ_i = 42° and θ_i = 50°, respectively, for an ideal nanostructure and a structure with a defect. The maximum of this parameter in the second case is approximately 3 times greater than the maximum in the first. The arguments of the complex ellipsometric parameters for the two cases under study show significant differences in the range of incidence angles 27° ÷53°. Both angular spectra of ellipsometric parameters demonstrate a pronounced difference depending on the angle of incidence for an ideal nanostructure and a structure with a defect, which can serve as a more subtle diagnostic tool compared to conventional reflection and transmission energy spectra. It is shown that the shape and nature of the polarization ellipse of elliptically polarized light reflected from the nanostructure are particularly sensitive to defects.

Keywords:periodic nanostructure, reflected wave defect, ellipsometric parameters, angular spectra, elliptical polarization.