OPTIMIZATION OF MOVEMENT PATHS DURING AUTOMATIC FOCUSING IN COMPLEMENTARY LASER MICROMACHINING SYSTEMS

Katasonov Denis Nikolaevich, Moskaleva Violetta Mihailovna

The paper considers the formation of extended structures (tens of millimeters) using laser micromachining methods. These structures are characterized by microtopology (tens of microns), which imposes stringent requirements on the focused laser beam positioning system. The use of complementary laser beam scanning systems allows achieving the required positioning accuracy. The use of short-focus flat-field objectives allows for the required diameter of the focused laser beam. However, such objectives are characterized by small working field sizes (about 5x5 mm) and a small beam waist (about 10-15 μm). This, in turn, requires dividing the object into separate recording zones, for each of which it is necessary to ensure the positioning of the lens relative to the substrate. This requirement can be met by measuring the distance to the center of each recording zone, which in turn leads to a large number of substrate movements before the formation of the object. This paper discusses an approach to the implementation of an automatic focusing system that allows for reducing the number of such movements.

Keywords:laser micromachining, CAD model, automatic focusing, transportation problem, traveling salesman problem, complementary system.